UV LED 100 ũ β GaN
Ĩ Ų Ĩ ij¡Ͽ ý۰ 濭 شȭ uv ledĨ ̴. ΰǸ
1-8% uv Ǹ, 80% ̻ ȴ.
1), LED
.1962 GE GaAsP ̿ LED ߸, 1968 .
. 1980뿡 AlGaAs ̿ ֵ LED ߵǸ鼭 sign, signal,
display о߷ DZ ۵.
, 1 9 9 2 InGaAlP ̿ ʰֵ LED ߵǸ鼭 ȣ, ڵ
ȰDZ .
. ȭ ݵü 1986 Ϻ īŰ AlN ̿Ͽ ǰ GaN
Mg LEEBI (low-energy electron beam irradiation)
ó ̿Ͽ 21 01 6c m- 3
1991 p-n ս GaN LED .
. 1993 ġ ī ڻ簡 ¿ GaN ۸ Ͽ
ȭ ڸ Ͽ, InGaN/GaN ߾ 칰 Ȱ ֵ û LED
ߵ.
. 2000 InGaAlP LED ȿ 100 lm/W ϸ鼭 (80 lm/W)
ɰϴ ȿ .
- 2000 ķ RGB L E D ȿ ӵ ϸ鼭 ܸ
LCD Ʈ, ڵ, , Ư о о
LED
LED 迭
2). UV LED Ư¡
|
- 0 .3 mm ~ 2 mm Ĩ ϰ ⼺ ̹Ƿ
ǰ ȭ
- ʳ( ~ 1 0- 8) ӵ Ƿ on-off Ī
ſ
- ʱ 50% ҽ Ϲ ǿ GaN 迭 LED
10
ð, GaAs LED 100 ð .
- Ʈ Ƿ Ӻ ϴ
- Ĩ Ǵ Ĩ µ ſ ΰϴ. |
µ 庯ȭ ȭ ū UV LED ȭ ſ
ū ɸ̸, ̸ ذϴ led ū ǥ̴.
3). ȿ UV LED Ʈ
( κ LED Ű¡ LED ȿ ̰ 꼺 ø õ ڷ̹Ƿ
LED Ĩ Ͼ ƴ϶ ʿ )
.
LED ǿ GaN LED Sapphire, SiC, GaN, Si Ǹ,
ܰ ַ Sapphire ϸ Cree SiC ϱ
.( InGaAlP AlGaAs 迭 LED GaAs ).
GaN ں ̾ ̰ ..
Si ϰ ϱ ȭ ϸ Ͽ
õϰ ں ũ Sapphire soft ̱
ư ٴ ִ.
. ý (Epitaxy)
LED ⺻ 屸
|
- LED MOCVD (metal organic chemical
vapor deposition) Ű
50 um̻ ĸ (thick film) HVPE(hydride vapor phase
epitaxy) Ų.
- GaAs ̿ InGaAlP LED ̹Ƿ
ȵ
Sapphire ǰ ȭ յ ſ
ũǷ ٺ Ծ
Ұϴ.
- ȭ LED (dislocation) ּȭϰ ĸ
ϱ
⺻ ϴ μ, 500
α ¿ AlGaN
(0¡1) (nucleation layer)
20-30 nm µ ÷
ܰȭ Ű ϰ ִ.
- n -, Ȱ, p- Ű p -ذ
߱ p - ε p+ Ŵ.
ϼ LED ⺻ DZ
Ʒ .
- Ȱδ ȿ ̱ ߾ 칰 (Multi quantum well,
MQW) ϴµ ϴ 칰 庮 β Ѵ. |
[ ȭ LED ⺻ ]
|
- δ n- Si Ǹ p-
InGaAl P ῡ
Zn, ȭ迡 Mg Ǵµ M g Ȱȭ ġ
ʾ p
.
- ̴ Ұ Mg Ͽ Mg-H ü ϸ
compensation DZ ε
Mg-H ֱ ī
Ű LEEBI ó õƾ Ŀ ī
ڻ翡 õ ó
ε ȿ .
- AlGaN/GaN 迭 ǰ ū ںյ ̿ܿ â ũǷ
Al β ڸ crack
Ƿ Ӱβ ʰ
̿ Ȱ ʿ. |
. GaInN (epitaxy layer)
|
- GaInN 0.7 eV (1771 nm)
ſ .
- ̴ InXG a1 - XN ( 0¡1 ) ܼ ڿܼ
ϴ
ǹϸ GaInN ϴٸ, ȭ ݵü
UV LED
- Ga N In ų, InN Ga и
ϸ ̸ µ ̰ Ǹ In dissociation
ܼ ϱ
. |
. (Quantum dot)
|
- GaN/AlN ̵ ڻ ̴ 3% μ
III-V ȭչݵü
ڻ ̿ ϱ 쿡 ǰ
- InGaN ȿ⺸ٴ InGaN ü и In
ұϼ carrier localization ߱ȿ Ѵٴ
˷.
- ũ⸦ Ͽ ߱ ϹǷ RGB ߱ϴ
߱ Ͽ . |
. ý
|
- Epitaxial lateral overgrowth (ELO)
1980 ߹ integrated circuits (IC)
Si ELO ۵.
- 1 9 8 0 Ĺݺ opto-electric integrated circuits (OEIC)
LPE, MOCVD,
MBE ̿ GaAs, GaP, InP ELO
ߴϿ, 1990 Ĺ LED
, LD , MOCVD,
HVPE ̿ G a N ELO
ߵ.
- ȭݵü 1997 GaN/SiC ó
- GaN ڸ sapphire, Si, SiC ũ
Ͽ , ϰ,
threading dislocation
(TD) bendingǰų mask ܵν ǥ ħ .
- ̷ Ư ̿Ͽ, SiO2 PECVD mask patterningϰ
GaN
MOCVD ϸ window (Ȥ seed )κ
Ǵ GaN SiO2 mask
鼺ϰ SiO2 mask GaN
ʴ ǰ
. |
|
- wing TD density 뷫 ~ 106 cm- 2
window κп
10,000 . Ͽ
ӵ ӵ 2 ̻
ų . 1997 ī ڻ翡 ELO GaN
InGaN-based short-
wavelength
LD ۵ν GaN ELO LD ȿ .
- Pendeo-Epitaxy (PE), Cantilever Epitaxy (CE), Lateral
Epitaxy on Patterned Sapphire
(LEPS) Ͽ TD ǥħ
Ű ELO
͵.
- Pendeo epitaxy maskless ELO Ҹ, 2001R.F.Davis
쿡 ó
- GaN Sapphire , DZ ǽ İϿ patterningϰ
ٽ GaN ϸ,
ʰ GaN 켼ϰ
. Ͽ ӵ ӵ
2 ̻ ų
, SiO2 mask ʴ Ư¡ .
- FIELO (Facet-initiated ELO) 1997 Usui ߵ
HVPE ̿
μ, ELO GaN<1-100>
SiO2 mask ä. Ͽ
ó facet HVPE ̿Ͽ GaN β Ͽ ǥ ȰѴ |
Pendeo Epitaxy
|
- κ mask κ
window TD
density ҽų ִ .
- FACELO (Facet-controlled ELO) 2000 Ϻ Mie Hiramatsu
Sumitomo
Corporation ߵ ̸, MOCVD
ٸ ǿ 2-step ELO
ϴ
- ELO GaN<1-100> SiO2 mask ,
(Ȥ
) Ͽ facet ȰȭŲ , (Ȥ )
ٸ facet Ȱȭ
ǥ źȭŰ . FIELO HVPE ̿Ͽ
β GaN β
ϴ ǥ źȭϿ FACELO MOCVD
ٸ Ͽ
GaN ڸ źȭŲٴ ٸ.
- Hiramatsu FACELO ̿Ͽ GaN ڸ TD density
106 cm2
ְ, ũ GaN <0001>
tilt undoped GaN tilt ִ
- University of California at Santa Barbara DenBaars
쿡 2 0 0 1 ELO
Ǿ ߵ cantilever epitaxy (CE)
̿Ͽ SiC ǰ Si
GaN ڸ ,
- CE ELO ٸ ϰ GaN seed ʴ´ٴ
.
SiC̳ Si stripe
m Ī stripe
top plane GaN trench
Ű .
stripe top plane GaN ڸ
trench GaN Ǵµ
trench GaN stripe ̱ ϱ
stripe top plane
GaN 忡 .
- Katona Si ǰ SiC CE GaN Ͽ AFM image
Ÿ dartk
pit density stripe ltrench
CE GaN/SiC 9108cm2
Ͽ, CE GaN/Si(111) 7.5109 cm2,
wing dark pit
ʾҴٰ
.
- TD ħ dielectric mask
0.8
wing tilt ȴٰ . |
. Ĩ (Fabrication)
|
- LED Ĩ ϱ ؼ 뱤(photolithography),
İ(etching), ݼ
(metallization), Passivation,
lapping/polishing 0.30.3
0.1mm Ĩ иǴµ
ȿ ũ Ҽ
- GaAs ϴ InGaAlP LED ̹Ƿ top-bottom
·
Sapphire ϴ , ü̹Ƿ
ϱ
n - GaN Ϻ İ(mesa etching)Ͽ top-top ġ.
- p - p 帧 Ȱϰ ϱ Ͽ رݼӰ
p - ̿ 5 - 7nm β ݼӸ Ȱ.
- ֱٿ ݼ ش ݼ ȭ ̿ Ͽ
90% ̻ ۵ ȴٴ . |
. øĨ(flip chip)
|
- ȿ(extraction efficiency) 캸,
߱ڴ ǹ
߱ ݼ̳ е(bonding
pad), ο
Ǿ ս ŭ.
- , ߱ڸ ؼ ũⰡ Ŀ ,
Ŀ p -GaN
ʾƼ ü ߱
ϰ ǹǷ ũ Ѱ谡 . ,
L E D ϱ ؼ
߱ ȿ, ũ, ٰ ؾ .
- ̷ Ͽ øĨ(flip-chip) ߱ڰ . øĨ ̿
߱
ڴ Sapphire
- øĨ Ŀ S a p p h i r e ν ݼ ˺γ
е,
ο ս ִ . β p
- metal Ͽ
Ǿ ϰ, p-GaN
ݻ ݼ
ν S a p p h i r e κ ݻ
ȿ Ŵ.
- ߱ Ŀ .
߱ 200/W .
- øĨ β p ݼ ̿ϴµ Ȱκ pݼӱ
Ÿ Ƿ 濭 ϰ 濭Ḧ ̿Ͽ
ũ ҽų
. 8/W (Lumileds Luxeon ) .
- Solder ball ߿Ͽ solder ball , ϼ,
ɰ 꼺 ¿ϴ Ұ . |
. ȿ
- Ĩ ο ڴ Կ ȯDZ ϰ ݻ(internal
total reflection) ȿ travelling ϴٰ ҸǴ ս ũ
Ͽ ̸ ּȭ ʿ䰡 .
- ݻ Ĩ л ü Ĩ Ĩ ܺȯ ̰
Ĩ ܺθ 鿡 ݻ簡 µ Ư ݻ簢 ̻ 100% ݻǴ .
- ̷ Ϲ LED ȿ غ 10% Ұϸ ̸ ø
ū ̴.
- ǥ鿡 ݻ縦 ̴ δ ǥ鿡 ڰ ϰ scattering ǵ ǥ
ϴ (fixture), Ĩ Ƕ̵ ϴ (TIP, truncated
inverted pyramid Ǵ ATON øĨ NOTA) ֱٿ Ư
ڸ Ǵ ݻŰ LED ǥ鿡 ڰ (photonic crystal)
ʹϴ õǰ .
- ݼӱ ϴ ( Thin GaN)
ȿ 72% .
- Ĩ 11mm ̻ Ĩ ϸ Ĩ ũⰡ ϸ ذ Ÿ ־鼭
p - Ȯ Ƿ ġ Ʒ ó پϰ 迭 (finger
cell Ǵ multi parallel cell ) .
. Ű¡(Packaging)
Ĩ ̳ ýۿ ϵ Ű ģ, Ű Ĩ ܺηκ ȯ,
, ȭ, ȣ ִ Ӹ ƴ϶, ȿ , Űüμ ҵ
ſ ߿ϴ.
ǰ پϰ ǥر ſ Ű ° ǥ ,
SMD(surface mount device), COB(chip on board), BLU(backlight
unit) ִ.
Ű ǰ ʹȭ(side view BLU), ȭ(top view
BLU), ȭ() ǰ ִ(ġ Ű ε) .
Ű Ǿ mount , , ڿܼ ̸
LED ̷ ɰ.
Lumileds 1-5 W LED ̷ ִ ǰ̴.
|